Accuris Semiconductor devices - Micro-electromechanical devices - Part 12: Bending fatigue testing method of thin film materials using resonant vibration of MEMS structures JIS C 5630-12

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Semiconductor devices - Micro-electromechani cal devices - Part 12: Bending fatigue testing method of thin film materials using resonant vibration of MEMS structures
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Description
Semiconductor devices - Micro-electromechani cal devices - Part 12: Bending fatigue testing method of thin film materials using resonant vibration of MEMS structures
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Semiconductor devices - Micro-electromechanical devices - Part 12: Bending fatigue testing method of thin film materials using resonant vibration of MEMS structures - JIS C 5630-12 - Accuris
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Semiconductor devices - Micro-electromechanical devices - Part 12: Bending fatigue testing method of thin film materials using resonant vibration of MEMS structures
JIS C 5630-12
Semiconductor devices - Micro-electromechanical devices - Part 12: Bending fatigue testing method of thin film materials using resonant vibration of MEMS structures JIS C 5630-12
Semiconductor devices - Micro-electromechani cal devices - Part 12: Bending fatigue testing method of thin film materials using resonant vibration of MEMS structures

Semiconductor devices - Micro-electromechanical devices - Part 12: Bending fatigue testing method of thin film materials using resonant vibration of MEMS structures

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  Accuris
Product Category Standards and Technical Documents
Product Number JIS C 5630-12
Product Name Semiconductor devices - Micro-electromechanical devices - Part 12: Bending fatigue testing method of thin film materials using resonant vibration of MEMS structures
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