STANDARD METHOD FOR MEASUREMENT OF OXIDE THICKNESS ON SILICON WAFERS AND METALLIZATION THICKNESS BY MULTIPLE- BEAM INTERFERENCE (TOLANSKY METHOD)
| Accuris | |
|---|---|
| Product Category | Standards and Technical Documents |
| Product Number | F388 |
| Product Name | STANDARD METHOD FOR MEASUREMENT OF OXIDE THICKNESS ON SILICON WAFERS AND METALLIZATION THICKNESS BY MULTIPLE- BEAM INTERFERENCE (TOLANSKY METHOD) |