STANDARD TEST METHOD FOR SHEET RESISTANCE OF SILICON EPITAXIAL, DIFFUSED, AND ION- IMPLANTED LAYERS USING A COLLINEAR FOUR-PROBE ARRAY
| Accuris | |
|---|---|
| Product Category | Standards and Technical Documents |
| Product Number | F374 |
| Product Name | STANDARD TEST METHOD FOR SHEET RESISTANCE OF SILICON EPITAXIAL, DIFFUSED, AND ION- IMPLANTED LAYERS USING A COLLINEAR FOUR-PROBE ARRAY |