Standard Specification for High-Purity Copper Sputtering Target Used for Through- Silicon Vias (TSV) Mettalization
| Accuris | |
|---|---|
| Product Category | Standards and Technical Documents |
| Product Number | F3192 |
| Product Name | Standard Specification for High-Purity Copper Sputtering Target Used for Through- Silicon Vias (TSV) Mettalization |