Standard Specification for High-Purity Titanium Sputtering Target Used for Through- Silicon Vias (TSV) Metallization
| Accuris | |
|---|---|
| Product Category | Standards and Technical Documents |
| Product Number | F3166 |
| Product Name | Standard Specification for High-Purity Titanium Sputtering Target Used for Through- Silicon Vias (TSV) Metallization |