Semiconductor devices \x96 Micro-electromechani
| Accuris | |
|---|---|
| Product Category | Standards and Technical Documents |
| Product Number | DS/EN 62047-25 |
| Product Name | Semiconductor devices \x96 Micro-electromechanical devices \x96 Part 25: Silicon based MEMS fabrication technology \x96 Measurement method of pull-press and shearing strength of micro bonding area |