Semiconductor devices \x97 Micro-electromechani
| Accuris | |
|---|---|
| Product Category | Standards and Technical Documents |
| Product Number | BS IEC 62047-46 |
| Product Name | Semiconductor devices \x97 Micro-electromechanical devices Part 46: Silicon based MEMS fabrication technology \x97 Measurement method of tensile strength of nanoscale thickness membrane |