Semiconductor devices \x96 Micro-electromechani
| Accuris | |
|---|---|
| Product Category | Standards and Technical Documents |
| Product Number | 62047-45 |
| Product Name | Semiconductor devices \x96 Micro-electromechanical devices \x96 Part 45: Silicon based MEMS fabrication technology \x96 Measurement method of impact resistance of nanostructures |