Semiconductor devices \x96 Micro-electromechani
| Accuris | |
|---|---|
| Product Category | Standards and Technical Documents |
| Product Number | 62047-11 |
| Product Name | Semiconductor devices \x96 Micro-electromechanical devices \x96 Part 11: Test method for coefficients of linear thermal expansion of free-standing materials for micro-electromechanical systems |