The C15765-01 is a PHEMOS-X high-resolution emission microscope designed to pinpoint semiconductor failure locations by detecting weak light and thermal emissions. The system supports multiple detector options, including CMOS, InGaAs, and ThermoDynamic cameras for visible, near-infrared, and mid-infrared analysis, and features a stage with a working range of 20 mm in X and Y and 80 mm in Z. It includes a superimposed image display function, grid and scale overlays, thumbnail storage, and split-screen viewing. The main unit measures 1656 mm (W) × 2000 mm (H) × 1247 mm (D) and weighs approximately 1640 kg. It operates on single-phase 200 V to 240 V and meets Class 1 laser safety standards per IEC 60825-1.
Handles from visible light to near-infrared light with one unit by equipping with a multi-wavelength laser
The PHEMOS-X is a high-resolution emission microscope that pinpoints failure locations in semiconductor devices by detecting the weak light emissions and heat emissions caused by defects.
PHEMOS is a registered trademark of Hamamatsu Photonics K.K. (China, EU, Japan, Korea, Taiwan, USA).
| Hamamatsu Photonics Europe | |
|---|---|
| Product Category | Microscopes |
| Product Number | C15765-01 |
| Product Name | Semiconductor manufacturing support systems, Failure analysis system |
| Application | Semiconductor |