The pHMB Proximity Booster Pump is a water-cooled, positive displacement Roots vacuum pump which is driven through an a.c. inverter.
Each pump must be backed using a suitable Edwards dry pump selected to match process and performance specifications.
| Edwards Vacuum | |
|---|---|
| Product Category | Vacuum Pumps and Vacuum Generators |
| Product Number | pHMB3000 |
| Product Name | pHMB Mechanical Booster |
| Vacuum Pump Type | Mechanical |
| Configuration | Individual Vacuum Pump |
| Application | Semiconductor |
| Mechanical | Lobed Rotor |
