Mistral is an electrically-heated hot air oxidation unit coupled with a proven three-stage wet scrubber and self-cleaning inlets. Mistral employs a patented hydrogen inject system and is capable of removing pyrophoric and acid gases) for semiconductor applications such as polysilicon and oxide deposition as well as the high fluorine flows from processes that employ remote nitrogen trifluoride (NF3) clean.
| Edwards Vacuum | |
|---|---|
| Product Category | Thermal Oxidizers and Catalytic Oxidizers |
| Product Number | Mistral |
| Product Name | Oxidation Unit |
| Applications | Semiconductor Applications |
