Edwards advanced semiconductor vacuum pumps have been field-proven to perform to the highest operating standards. Reliability and high performance are achieved by extending service life, improving uptime and increasing productivity, while minimizing footprint and cost of ownership.
The iH1800HTX is specifically designed for processes such as 300 mm LPCVD Nitride, where higher operating temperatures are required to prevent process gas condensation.
| Edwards Vacuum | |
|---|---|
| Product Category | Vacuum Pumps and Vacuum Generators |
| Product Number | iH1800HTX |
| Product Name | iH Dry Pump |
| Vacuum Pump Type | Mechanical |
| Configuration | Combination |
| Application | Semiconductor |
| Pumping Speed | 1058 CFM (1800 m³/hr) |
| Ultimate Vacuum | 7.50E-4 torr (29.9 in Hg vac) |
