The iGX Dry Vacuum Pump Series sets new standards for zero maintenance between major overhauls. Improved efficiency lowers the cost of ownership and provides continuous pumping duty throughout the pressure range.
iGX drypumps include Ethernet connectivity allowing key data to be viewed via web pages, as well as a comprehensive set of networking options to assure continuous pump availability.
iGX pumps are available in a wide range of peak speeds and variants to address applications from clean through to medium-duty processes. A modular design allows users to configure iGX drypumps to suit individual fab requirements. An ultra-compact footprint allows installation options including on-tool, close proximity, or remote.
| Edwards Vacuum | |
|---|---|
| Product Category | Vacuum Pumps and Vacuum Generators |
| Product Number | iGX100L |
| Product Name | iGX Dry Pump |
| Vacuum Pump Type | Mechanical |
| Configuration | Individual Vacuum Pump |
| Application | Semiconductor |
| Pumping Speed | 61.74 CFM (105 m³/hr) |
