EBARA Technologies, Inc. PureAir S.DOC

Description
  • PureAir S.DOC - EBARA Technologies, Inc.
    EBARA Technologies, Inc.
Description

Suppliers

Company
Product
Description
Supplier Links
PureAir S.DOC - - EBARA Technologies, Inc.
EBARA Technologies, Inc.
Sacramento, CA, USA
PureAir S.DOC
PureAir S.DOC
Supplier's Site

Technical Specifications

  EBARA Technologies, Inc.
Product Category Thermal Oxidizers and Catalytic Oxidizers
Product Name PureAir S.DOC
Applications Silane, TEOS, Tungsten, Dichlorosilane, Ammonia, Phosphine
Oxidizer Type Silane Dynamic Oxidation
Oxidation Technology Regenerative Thermal
Unlock Full Specs
to access all available technical data

Similar Products

Burn-wet system - CT-BW - Pfeiffer Vacuum, Inc.
Pfeiffer Vacuum, Inc.
Burn-wet system
CT-BW
Specs
Applications LPCVD / Diffusion; High flow applications; PECVD; Oxyde Etch; ALD
Oxidizer Type Thermal
Dimensions 1300 x 800 x 1930 mm
View Details
Boiler Thermal Oxidizers - - INDECK Power Equipment Company
INDECK Power Equipment Company
Boiler Thermal Oxidizers
Specs
Applications Boilers/Steam Generators
Oxidizer Type Thermal
View Details
Remote Plasma Source and Power Delivery System - Litmas® RPS - Advanced Energy Industries, Inc.
Advanced Energy Industries, Inc.
Remote Plasma Source and Power Delivery System
Litmas® RPS
Specs
Applications Abatement of Environmentally-Harmful PFC Gases
Oxidizer Type Thermal
Oxidation Technology Inductive Plasma
View Details
Fume Incinerators - - Surface Combustion, Inc.
Surface Combustion, Inc.
Fume Incinerators
Specs
Oxidizer Type Thermal
Oxidation Technology Direct Flame
Mounting Indoor
View Details