EBARA Technologies, Inc. PureAir S.DOC

Description
Description

Suppliers

Company
Product
Description
Supplier Links
PureAir S.DOC -  - EBARA Technologies, Inc.
Sacramento, CA, USA
PureAir S.DOC
PureAir S.DOC
Supplier's Site

Technical Specifications

  EBARA Technologies, Inc.
Product Category Thermal Oxidizers and Catalytic Oxidizers
Product Name PureAir S.DOC
Applications Silane, TEOS, Tungsten, Dichlorosilane, Ammonia, Phosphine
Oxidizer Type Silane Dynamic Oxidation
Oxidation Technology Regenerative Thermal
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