The VULCANO XYZ3TH platform is made up of the standard Vulcano XY outfitted with the Z3TH combined module. This 4 degrees of freedom module, provides 364° Theta rotation, double Z-axes, a coarse one for wafer loading and unloading, and a fine one for focus adjustment, as well as a Tip and Tilt correction over ±0.1°.
Characteristics
Compact footprint
Nanometer position stability
High dynamics: 2.5 g, 1.5 m/s
Low move and settle times
ISO1 clean room compatible
Tip-Tilt correction over ±0.1°
Double Z integration
Built-in gravity compensator in Z
Outstanding Z straightness
Enhanced Z repeatability and jitter
Ability to correct stage flatness
Built-in vacuum supply at chuck level
The VULCANO XYZ3TH platform is made up of the standard Vulcano XY outfitted with the Z3TH combined module. This 4 degrees of freedom module, provides 364° Theta rotation, double Z-axes, a coarse one for wafer loading and unloading, and a fine one for focus adjustment, as well as a Tip and Tilt correction over ±0.1°.
Characteristics
- Compact footprint
- Nanometer position stability
- High dynamics: 2.5 g, 1.5 m/s
- Low move and settle times
- ISO1 clean room compatible
- Tip-Tilt correction over ±0.1°
- Double Z integration
- Built-in gravity compensator in Z
- Outstanding Z straightness
- Enhanced Z repeatability and jitter
- Ability to correct stage flatness
- Built-in vacuum supply at chuck level
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ETEL S.A.
