ETEL S.A. XYZ3TH Stacked Platform VULCANO XYZ3TH

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XYZ3TH Stacked Platform - VULCANO XYZ3TH - ETEL S.A.
Môtiers, Switzerland
XYZ3TH Stacked Platform VULCANO XYZ3TH
The VULCANO XYZ3TH platform is made up of the standard Vulcano XY outfitted with the Z3TH combined module. This 4 degrees of freedom module, provides 364° Theta rotation, double Z-axes, a coarse one for wafer loading and unloading, and a fine one for focus adjustment, as well as a Tip and Tilt correction over ±0.1°. Characteristics Compact footprint Nanometer position stability High dynamics: 2.5 g, 1.5 m/s Low move and settle times ISO1 clean room compatible Tip-Tilt correction over ±0.1° Double Z integration Built-in gravity compensator in Z Outstanding Z straightness Enhanced Z repeatability and jitter Ability to correct stage flatness Built-in vacuum supply at chuck level

The VULCANO XYZ3TH platform is made up of the standard Vulcano XY outfitted with the Z3TH combined module. This 4 degrees of freedom module, provides 364° Theta rotation, double Z-axes, a coarse one for wafer loading and unloading, and a fine one for focus adjustment, as well as a Tip and Tilt correction over ±0.1°.

Characteristics

  • Compact footprint
  • Nanometer position stability
  • High dynamics: 2.5 g, 1.5 m/s
  • Low move and settle times
  • ISO1 clean room compatible
  • Tip-Tilt correction over ±0.1°
  • Double Z integration
  • Built-in gravity compensator in Z
  • Outstanding Z straightness
  • Enhanced Z repeatability and jitter
  • Ability to correct stage flatness
  • Built-in vacuum supply at chuck level
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Technical Specifications

  ETEL S.A.
Product Category Linear Slides and Linear Stages
Product Number VULCANO XYZ3TH
Product Name XYZ3TH Stacked Platform
Z-Axis Travel 0.4724 inch (12 mm)
Y-Axis Travel 0.0 to 25.59 inch (0.0 to 650 mm)
Rated Speed 59.06 in/sec (90 m/min)
Motor Type Ironcore
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