ETEL S.A. XYT Stacked Platform CHARON2 XYT

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XYT Stacked Platform - CHARON2 XYT - ETEL S.A.
Môtiers, Switzerland
XYT Stacked Platform
CHARON2 XYT
XYT Stacked Platform CHARON2 XYT
The CHARON2 platforms are built on a robust, reliable and elegantly stacked architecture, designed with modularity and scalability principles in mind. They start from a standalone X axis and can be extended to a complete motion system of up to 7 axes. Datasheets performance are available with different electronics configurations. Their compatibility with current and future modules and options allows coverage of the broadest application space and use cases. These flexible, scalable, modular and upgradeable platforms offer an entry level to all semiconductor applications and many use cases of other markets, for instance medical, pharmaceutical, material science and others. Continuously evolving in all served markets, CHARON2 supports OEM's product lifetime extension as well as upgrade paths. Its position accuracy of ±1 µm level paired with excellent bidirectional repeatability and high dynamics sustains applications development in all technology and industry fields. CHARON2 XYT specifications Total stroke: 475 mm for X (bottom axis), 410 mm for Y (top axis) and infinite for T Position accuracy: ±1 µm for X (bottom axis), ±1 µm for Y (top axis) and ±3 arcsec for T Position stability: ±2 nm for X (bottom axis), ±2 nm for Y (top axis) and ±0.02 arcsec for T Bidirectional repeatability: ±0.4 µm for X (bottom axis), ±0.4 µm for Y (top axis) and ±2 arcsec for T CHARON2 Stacked Platforms characteristics Total stroke : up to 650 mm x 410 mm Available in 9 standards x 2 electronics = 18 configurations as off-the-shelf products Compact footprint Payload up to 30 Kg Included options and features: rails particle suction (ETEL patent), custom signals, pneumatic lines, and more ISO1 clean room compatibility Tip-Tilt correction with the Z3TM combined module Built-in vacuum supply at chuck level Short move and settle times

The CHARON2 platforms are built on a robust, reliable and elegantly stacked architecture, designed with modularity and scalability principles in mind. They start from a standalone X axis and can be extended to a complete motion system of up to 7 axes. Datasheets performance are available with different electronics configurations.

Their compatibility with current and future modules and options allows coverage of the broadest application space and use cases. These flexible, scalable, modular and upgradeable platforms offer an entry level to all semiconductor applications and many use cases of other markets, for instance medical, pharmaceutical, material science and others.

Continuously evolving in all served markets, CHARON2 supports OEM's product lifetime extension as well as upgrade paths. Its position accuracy of ±1 µm level paired with excellent bidirectional repeatability and high dynamics sustains applications development in all technology and industry fields.

CHARON2 XYT specifications

  • Total stroke: 475 mm for X (bottom axis), 410 mm for Y (top axis) and infinite for T
  • Position accuracy: ±1 µm for X (bottom axis), ±1 µm for Y (top axis) and ±3 arcsec for T
  • Position stability: ±2 nm for X (bottom axis), ±2 nm for Y (top axis) and ±0.02 arcsec for T
  • Bidirectional repeatability: ±0.4 µm for X (bottom axis), ±0.4 µm for Y (top axis) and ±2 arcsec for T

CHARON2 Stacked Platforms characteristics

  • Total stroke : up to 650 mm x 410 mm
  • Available in 9 standards x 2 electronics = 18 configurations as off-the-shelf products
  • Compact footprint
  • Payload up to 30 Kg
  • Included options and features: rails particle suction (ETEL patent), custom signals, pneumatic lines, and more
  • ISO1 clean room compatibility
  • Tip-Tilt correction with the Z3TM combined module
  • Built-in vacuum supply at chuck level
  • Short move and settle times
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Technical Specifications

  ETEL S.A.
Product Category Linear Slides and Linear Stages
Product Number CHARON2 XYT
Product Name XYT Stacked Platform
Y-Axis Travel 0.0 to 16.14 inch (0.0 to 410 mm)
Motor Type Ironcore
Device Type Multi-Axis Configuration
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