Waste Gas Treatment with LARCH (oxidation/pyrolysis ) at the Point-Of-Use Process Waste Gas Treatment with LARCH for LED Processes LARCH is our latest Point-of-Use waste gas treatment system especially designed for MOCVD processes. It is capable of treating large flows of Hydrogen and Ammonia as well as small flows of metal-organics and dopants, which are typically found in common LED processes. The treatment combination of oxidation und pyrolysis extends DAS´ technology portfolio in a sustainable way. Low investment and operating costs, simple, robust design and low environmental impact (no CO2 emissions, minimum NOx emission) characterize LARCH. The maintenance interval is expected to exceed six months. LARCH Operating Principle The system operates in three steps. First, the process waste gases are introduced through a special packed inlet into the decomposition zone. There decomposition of Ammonia (2NH3 à N2 +3H2) takes place. Following the Hydrogen is electrically ignited and oxidized. The waste gases are burned and oxidized within the reactor (2H2 + O2 à 2H2O). Finally the waste gases are cooled (< 60 °C), which can be released into the environment without any further treatment as they meet the strict German standards for air pollution (TA Luft). The following equipment options are available for all LARCH systems: Power Supply: 3 x 400 V/50 Hz or 3 x 208 V/60 Hz Process Tool Interface Signal Tower Drip Pan Earthquake Safety Kit