Waste Gas Scrubbing with AQUABATE (wet) at the Point-Of-Use AQUABATE - Point-of-Use Waste Gas Scrubber The AQUABATE product line completes DAS´waste gas treatment portfolio. The well proven solution is a pure wet scrubber technology for efficient abatement of water-soluble harmful substances from process waste gases. The gas scrubber is employed mainly in the semiconductor industry, as a Point-of-Use (POU) wet treatment system. Installed closely behind the vacuum pumps, AQUABATE optimally protects the fab’s exhaust gas system from contamination and corrosion. Maintenance is quick and easy with access for operation and maintenance on the front and back sides. Other advantages are the high disposal efficiency, low investment cost and a small footprint. Operation costs can be optimized with a process tool interface. Semi-Certification for gas scrubber AQUABATE by DAS The following equipment options are available for all AQUABATE gas scrubber systems: Power Supply: 3 x 400 V/50 Hz or 3 x 208 V/60 Hz Heated feed lines and inlets Lye metering system Process-Tool-Interfa ce Signal Tower Drip Pan Earthquake Safety Kit Monitoring