Only leak detectors are described which have an integral high vacuum system to maintain the sensing element of the mass spectrometer at a low pressure. Two procedures are outlined, one to determine the minimum detectable leak rate and the other for determination of the minimum detectable concentration ratio.
| CSA Group | |
|---|---|
| Product Category | Standards and Technical Documents |
| Product Number | ISO 3530:1979 |
| Product Name | Vacuum technology - Mass-spectrometer-type leak-detector calibration |
