ISO 27894:2009 defines terms relating to hot cathode ionization vacuum gauges, and specifies which parameters are given by manufacturers of hot cathode ionization gauges and which measurement uncertainties have to be considered when operating these gauges.
| CSA Group | |
|---|---|
| Product Category | Standards and Technical Documents |
| Product Number | ISO 27894:2009 |
| Product Name | Vacuum technology - Vacuum gauges - Specifications for hot cathode ionization gauges |