ISO 25178-604:2013 specifies the metrological characteristics of coherence scanning interferometry (CSI) systems for 3D mapping of surface height.
| CSA Group | |
|---|---|
| Product Category | Standards and Technical Documents |
| Product Number | ISO 25178-604:2013 |
| Product Name | Geometrical product specifications (GPS) - Surface texture: Areal - Part 604: Nominal characteristics of non-contact (coherence scanning interferometry) instruments |