Provides a test method of Time Dependent Dielectric Breakdown (TDDB) for gate dielectric films on semiconductor devices and a product lifetime estimation method of TDDB failure
| CSA Group | |
|---|---|
| Product Category | Standards and Technical Documents |
| Product Number | IEC 62374:2007 |
| Product Name | Semiconductor devices - Time dependent dielectric breakdown (TDDB) test for gate dielectric films |
