CSA Group Semiconductor devices - Micro-electromechanical devices - Part 1: Terms and definitions IEC 62047-1:2016

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IEC 62047-1:2016 defines terms for micro-electromechani cal devices including the process of production of such devices. This edition includes the following significant technical changes with respect to the previous edition: a) removal of ten terms; b) revision of twelve terms; c) addition of sixteen new terms.
Description
IEC 62047-1:2016 defines terms for micro-electromechani cal devices including the process of production of such devices. This edition includes the following significant technical changes with respect to the previous edition: a) removal of ten terms; b) revision of twelve terms; c) addition of sixteen new terms.

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Semiconductor devices - Micro-electromechanical devices - Part 1: Terms and definitions - IEC 62047-1:2016 - CSA Group
Toronto, Ontario, Canada
Semiconductor devices - Micro-electromechanical devices - Part 1: Terms and definitions
IEC 62047-1:2016
Semiconductor devices - Micro-electromechanical devices - Part 1: Terms and definitions IEC 62047-1:2016
IEC 62047-1:2016 defines terms for micro-electromechani cal devices including the process of production of such devices. This edition includes the following significant technical changes with respect to the previous edition: a) removal of ten terms; b) revision of twelve terms; c) addition of sixteen new terms.

IEC 62047-1:2016 defines terms for micro-electromechanical devices including the process of production of such devices. This edition includes the following significant technical changes with respect to the previous edition:
a) removal of ten terms;
b) revision of twelve terms;
c) addition of sixteen new terms.

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Technical Specifications

  CSA Group
Product Category Standards and Technical Documents
Product Number IEC 62047-1:2016
Product Name Semiconductor devices - Micro-electromechanical devices - Part 1: Terms and definitions
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