IEC 62047-1:2016 defines terms for micro-electromechani
a) removal of ten terms;
b) revision of twelve terms;
c) addition of sixteen new terms.
| CSA Group | |
|---|---|
| Product Category | Standards and Technical Documents |
| Product Number | IEC 62047-1:2016 |
| Product Name | Semiconductor devices - Micro-electromechanical devices - Part 1: Terms and definitions |