Yttria (yttrium oxide, Y2O3) is a rare-earth ceramic which exhibits both exceptional plasma resistance and an aptitude for high-temperature applications. Yttria is often used to stabilize other ceramic compositions like zirconia.
CoorsTek Exyria™ yttria can be formed into both solid parts and coatings for parts requiring exceptional corrosion resistance. Applying a PlasmaResist™ coating to compatible ceramic and metal components creates a corrosively inert barrier of pure yttria.
Example Applications
| CoorsTek | |
|---|---|
| Product Category | Industrial Ceramic Materials |
| Product Name | Specialty Engineered Ceramics, Yttria |
| Material Type | Yttria |
| Composition | Yttrium Oxide (Y2O3) |
| Applications | Etch chamber components |
| Max Use Temperature | 2000 C (3632 F) |
