End effectors, also referred to as semiconductor handling "blades", are the robot's hand to handle and move semiconductor wafers between positions. So end effectors must be dimensionally precise and thermally stable, while having a smooth, abrasion-resistant surface to safely handle wafers without producing particulate contamination. In some cases, ESD-safe ceramics are used to prevent static buildup on the wafer surface.
Semiconductor Processing Components
CoorsTek is your partner for custom advanced ceramic components and assemblies to support higher throughput and better yields in your semiconductor processing equipment,
Our materials experts are ready to work with you to develop the optimal right solution for your wafer handling, heating, and processing requirements.
Made from Quality Engineered Ceramics
Engineered ceramics make semiconductor components cleaner, more durable, more effective. Let us help you choose the best semiconductor-grade material for your application:
Aluminum Nitride (AlN)
Graphite / Carbon (C)
Silicon Carbides (SiC)
Semiconductor Wafer End Effectors
Chemical or material processing; Wear resistant parts or tooling