CoorsTek Insulators For High-Temperature Semiconductor Processing

Technical ceramics are a natural choice for semiconductor thermal processing applications including RTP (Rapid Thermal Processing), Epi (Epitaxial), diffusion, oxidation, and annealing. CoorsTek provides advanced material components specifically designed to withstand thermal shocks with high-purity, sturdy, repeatable performance for high-temperature, processes including: Diffusers Insulators Susceptors Other custom thermal components INSULATORS Ceramic insulators combine strong dielectric properties with thermal stability and corrosion resistance. Recommended RTP & EPI Materials UltraClean™ Recrystallized Silicon Carbide PureSiC® CVD Silicon Carbide PlasmaPure™ UC Ultra-Pure Alumina Clear Carbon™ SiC coated graphite