Technical ceramics are a natural choice for semiconductor thermal processing applications including RTP (Rapid Thermal Processing), Epi (Epitaxial), diffusion, oxidation, and annealing. CoorsTek provides advanced material components specifically designed to withstand thermal shocks with high-purity, sturdy, repeatable performance for high-temperature, processes including:
Diffusers
Insulators
Susceptors
Other custom thermal components
INSULATORS
Ceramic insulators combine strong dielectric properties with thermal stability and corrosion resistance. Recommended RTP & EPI Materials
UltraClean™ Recrystallized Silicon Carbide
PureSiC® CVD Silicon Carbide
PlasmaPure™ UC Ultra-Pure Alumina
Clear Carbon™ SiC coated graphite
Technical ceramics are a natural choice for semiconductor thermal processing applications including RTP (Rapid Thermal Processing), Epi (Epitaxial), diffusion, oxidation, and annealing. CoorsTek provides advanced material components specifically designed to withstand thermal shocks with high-purity, sturdy, repeatable performance for high-temperature, processes including:
- Diffusers
- Insulators
- Susceptors
- Other custom thermal components
INSULATORS
Ceramic insulators combine strong dielectric properties with thermal stability and corrosion resistance.
Recommended RTP & EPI Materials
- UltraClean™ Recrystallized Silicon Carbide
- PureSiC® CVD Silicon Carbide
- PlasmaPure™ UC Ultra-Pure Alumina
- Clear Carbon™ SiC coated graphite
