CoorsTek ceramic interferometer reference mirrors incorporate low expansion engineered ceramics from the most precise geometries, surface characteristics, and dimensional stability available.
Ceramic Components for Ion Implant Equipment
From precision air bearing components and beams to ultra-flat vacuum chucks and thermally stable pins, screws, and frames, advanced ceramic components are engineered for the demanding requirements and delicate nature of ion implant processes. CoorsTek provides advanced, RF-transparent ceramic components for high-performance ion implant equipment.
Recommended Materials for Ion Implant Processing
PlasmaPure™ UC Ultra-Pure Alumina
PureSiC® Ultra-Pure CVD Silicon Carbide
StatSafe™ ESD-Safe Ceramics
CoorsTek ceramic interferometer reference mirrors incorporate low expansion engineered ceramics from the most precise geometries, surface characteristics, and dimensional stability available.
Ceramic Components for Ion Implant Equipment
From precision air bearing components and beams to ultra-flat vacuum chucks and thermally stable pins, screws, and frames, advanced ceramic components are engineered for the demanding requirements and delicate nature of ion implant processes. CoorsTek provides advanced, RF-transparent ceramic components for high-performance ion implant equipment.
Recommended Materials for Ion Implant Processing
- PlasmaPure™ UC Ultra-Pure Alumina
- PureSiC® Ultra-Pure CVD Silicon Carbide
- StatSafe™ ESD-Safe Ceramics
