CoorsTek Ceramic Components for Ion Implant Equipment

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Ceramic Components for Ion Implant Equipment -  - CoorsTek
Golden, CO, USA
Ceramic Components for Ion Implant Equipment
From precision air bearing components and beams to ultra-flat vacuum chucks and thermally stable pins, screws, and frames, advanced ceramic components are engineered for the demanding requirements and delicate nature of ion implant processes. CoorsTek provides advanced, RF-transparent ceramic components for high-performance ion implant equipment. Recommended Materials for Ion Implant Processing PlasmaPure™ UC Ultra-Pure Alumina PureSiC® Ultra-Pure CVD Silicon Carbide StatSafe™ ESD-Safe Ceramics
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Technical Specifications

  CoorsTek
Product Category Specialty Ceramics
Product Number
Product Name Ceramic Components for Ion Implant Equipment
Applications Electronics or semiconductors; Ion Implant Equipment
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