Ceramic baffles provide more complete mixing of reactant gases in process tubes and chambers, improving uniformity and device yields.
Traditional diffusion, LPCVD (Low Pressure Chemical Vapor Deposition), and other batch semiconductor applications require the thermal and purity properties of advanced ceramics.
Recommended Diffusion & LPCVD Materials
| CoorsTek | |
|---|---|
| Product Category | Specialty Ceramics |
| Product Name | Baffles and Holders For Diffusion & LPCVD Equipment |
| Shape / Form | Custom Shape |