CoorsTek Baffles and Holders For Diffusion & LPCVD Equipment

Description
Ceramic baffles provide more complete mixing of reactant gases in process tubes and chambers, improving uniformity and device yields. Traditional diffusion, LPCVD (Low Pressure Chemical Vapor Deposition), and other batch semiconductor applications require the thermal and purity properties of advanced ceramics. Recommended Diffusion & LPCVD Materials TPSS, UltraClean™ Recrystallized Silicon Carbide PureSiC® CVD Silicon Carbide Coatings: CVD SiC Quartz
  • Baffles and Holders For Diffusion & LPCVD Equipment - CoorsTek
    CoorsTek
Description
Ceramic baffles provide more complete mixing of reactant gases in process tubes and chambers, improving uniformity and device yields. Traditional diffusion, LPCVD (Low Pressure Chemical Vapor Deposition), and other batch semiconductor applications require the thermal and purity properties of advanced ceramics. Recommended Diffusion & LPCVD Materials TPSS, UltraClean™ Recrystallized Silicon Carbide PureSiC® CVD Silicon Carbide Coatings: CVD SiC Quartz

Suppliers

Company
Product
Description
Supplier Links
Baffles and Holders For Diffusion & LPCVD Equipment - - CoorsTek
CoorsTek
Golden, CO, USA
Baffles and Holders For Diffusion & LPCVD Equipment
Baffles and Holders For Diffusion & LPCVD Equipment
Ceramic baffles provide more complete mixing of reactant gases in process tubes and chambers, improving uniformity and device yields. Traditional diffusion, LPCVD (Low Pressure Chemical Vapor Deposition), and other batch semiconductor applications require the thermal and purity properties of advanced ceramics. Recommended Diffusion & LPCVD Materials TPSS, UltraClean™ Recrystallized Silicon Carbide PureSiC® CVD Silicon Carbide Coatings: CVD SiC Quartz

Ceramic baffles provide more complete mixing of reactant gases in process tubes and chambers, improving uniformity and device yields.

Traditional diffusion, LPCVD (Low Pressure Chemical Vapor Deposition), and other batch semiconductor applications require the thermal and purity properties of advanced ceramics.

Recommended Diffusion & LPCVD Materials

  • TPSS, UltraClean™ Recrystallized Silicon Carbide
  • PureSiC® CVD Silicon Carbide
  • Coatings: CVD SiC
  • Quartz
Supplier's Site

Technical Specifications

  CoorsTek
Product Category Specialty Ceramics
Product Name Baffles and Holders For Diffusion & LPCVD Equipment
Shape / Form Custom Shape
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