Advanced Screw Design Efficient: cost-effective, minimal maintenance, high uptime Flexible: application-oriented Short Process Times: due to high pumping speeds Robust: anti-corrosion coating on internal components Compact Design
COBRA DS 0700 – 2000 G are dry screw vacuum pumps in the proven COBRA DS series. Their high pumping speeds, even under conditions in which a high hydrogen throughput is required, make COBRA DS screw vacuum pumps ideal for all demanding processes in the production of photovoltaic cells, flat screens and semiconductors. State of- the-art COBRA DS screw vacuum pump technology allows powder- and particle laden media to be evacuated.
COBRA DS dry screw vacuum pumps feature dry compression, a specially developed screw profile, and unimpeded gas discharge. The result is a high degree of vapor and particle tolerance. The screws are manufactured from a single piece casting avoiding any gaps, making the ingress of process fluids or particles impossible, and thereby preventing corrosion.
The COBRA DS 0700 – 2000 G feature an integrated vacuum booster as standard, providing higher pumping speeds and ultimate pressures. The backing pump and vacuum booster are combined on a compact base frame.
Equipped with high-efficiency motors, the COBRA DS 0700 – 2000 G offer excellent energy efficiency. With low maintenance requirements, low operating costs, a very high uptime and a long life cycle, the total cost-of-ownership is very low, setting the standard in this performance class.
Retrofitting these screw vacuum pumps to existing systems can be performed quickly and easily due to a fit-in-place design.
High-density plasma CVD (HDP-CVD)
Rapid thermal processing (RTP)
Sub-atmospheric CVD (SACVD)
Metal-organic CVD (MOCVD)
Plasma-enhanced CVD (PECVD)
Low-pressure CVD (LPCVD)
Atomic layer deposition (ALD)
Busch Vacuum Solutions
Vacuum Pumps and Vacuum Generators
COBRA DS 0700, 1000, 2000 G
Dry Screw Vacuum Pump with Integrated Vacuum Booster