Zygo Corporation Interferometer System for Multiple Surface Testing Verifire™ MST

Verifire™ MST laser interferometer enables precise optical metrology of multiple surfaces simultaneously, including plane parallel components with multiple reflections. The Verifire™ MST starts with the classical interferometer applications. These applications all measure the wavefront variations between two surfaces, a two-surface cavity. However, measuring an uncoated parallel plate gives two layered interferograms (a three-surface cavity) that confuse standard Phase Shift Interferometry algorithms. ZYGO has solved this problem using wavelength shifting of phase, and ZYGO's patented Fourier Transform Phase Shifting Interferometry (FTPSI). The Verifire™ MST can measure two-surface, three- and even four-surface cavities. Show all of the surfaces, or only the surfaces of interest, all within ZYGO's Mx™ software. Artifacts are naturally suppressed using FTPSI, eliminating the need for an extended source.