Zygo Corporation Silicon Carbide Mirror

ZYGO's Optics business segment custom manufactures silicon carbide mirrors to exacting standards. Silicon carbide (SiC) has long been recognized as an attractive mirror material due to its superior mechanical and thermal properties when compared to conventional optical materials. However, the material properties of silicon carbide, which make the material attractive from a design standpoint, have often precluded its use when low cost and rapid delivery of an optical mirror were required. It is normally expensive to produce a lightweighted, super-polished SiC substrate, and the lead-time for obtaining a finished substrate used to be several months. However, working in conjunction a material provider, and using deterministic finishing techniques for the rapid fabrication of lightweight silicon carbide optics, ZYGO can produce high-quality SiC mirrors in a much shorter time as compared to traditional techniques. Types In addition to flat mirrors, ZYGO produces a variety of types high quality custom optical mirrors, including: Aspheric mirrors EUV Mirrors Light-Weighted Mirrors Monolithic Mirrors Off-axis mirrors Parabolic mirrors Spherical mirrors Applications ZYGO has a long tradition of manufacturing custom-made optical mirrors for a wide variety of applications, including, but not limited to: EUV mirrors Lightweighted mirrors Space mirrors Stage Components for lithographic steppers X-ray mirrors Defense/Aerospace Medical/Life Sciences Industrial OEM Intelligence, surveillance & reconnaissance (ISR) Materials ZYGO has the capability to process a wide range of materials for optical mirrors. Our product capabilities include: CLEARCERAM® mirrors Cordierite mirrors Silicon Carbide mirrors Silicon mirrors ULE® mirrors Zerodur® mirrors In addition to plano silicon carbide mirrors, ZYGO has a wide range of optical manufacturing capabilities, such as: Multi-axis CNC machining & Single-Point Diamond Turning (SPDT) A large installed base of very large full aperture polishing process including many multi-meter class polishers Extensive experience in key sub-aperture finishing processes such as Computer Controlled Optical Surfacing (CCOS), Ion Beam Finishing (IBF) and Magneto-Rheological Finishing (MRF), through a variety of commercially available and custom made equipment Large coating capabilities and capacity Extensive cleaning (included automated) and inspection stations A wide range of metrology capabilities to characterize components across their entire Power-Spectral Density, with interferometers as large as 32" in diameter, and a wide range of state-of-the-art custom-made equipment.