Brooks Instrument Acrylic Tube Variable Area Flow Meter, 2001 Series 2001D2 / 2001D4 / 2001D6

Description
The 2001 Series flow meters provide a means of indication at the lowest cost for non-corrosive flow applications. The tapered metering tube is integrally machined in the acrylic body while a standard direct reading scale engraved on the body affords maximum simplicity of installation and operation. Available options include integral needle control valves, as well as flow controllers on the inlet or outlet. Features Ultra fast 300 millisecond settling time MultiFloTM gas and range programmability User Accessible Service Port with Advanced Diagnostics with User-Friendly Interface Corrosion resistant Hastelloy® sensor tube and valve seat. Pressure Transient Insensitivity (PTI), High Accuracy (HA), Safe Delivery System (SDS) Options Local display Extremely low wetted surface area Benefits Delivers outstanding performance, reliability, and flexibility. Ability to reconfigure the mass flow controller for new gas calibrations and full scale ranges without the time and costs of removing the device from the gas line. Convenient interface to diagnostics for maximum uptime. Ensures device is operating within user specified limits for high yield and maximum uptime. Provides unmatched long-term sensor stability ensuring maximum yield and throughput. Improves yield. Reduces overall gas panel costs. Key Applications Semiconductor MOCVD Gas flow control applications that require a high purity all-metal flow path
Datasheet
Description
The 2001 Series flow meters provide a means of indication at the lowest cost for non-corrosive flow applications. The tapered metering tube is integrally machined in the acrylic body while a standard direct reading scale engraved on the body affords maximum simplicity of installation and operation. Available options include integral needle control valves, as well as flow controllers on the inlet or outlet. Features Ultra fast 300 millisecond settling time MultiFloTM gas and range programmability User Accessible Service Port with Advanced Diagnostics with User-Friendly Interface Corrosion resistant Hastelloy® sensor tube and valve seat. Pressure Transient Insensitivity (PTI), High Accuracy (HA), Safe Delivery System (SDS) Options Local display Extremely low wetted surface area Benefits Delivers outstanding performance, reliability, and flexibility. Ability to reconfigure the mass flow controller for new gas calibrations and full scale ranges without the time and costs of removing the device from the gas line. Convenient interface to diagnostics for maximum uptime. Ensures device is operating within user specified limits for high yield and maximum uptime. Provides unmatched long-term sensor stability ensuring maximum yield and throughput. Improves yield. Reduces overall gas panel costs. Key Applications Semiconductor MOCVD Gas flow control applications that require a high purity all-metal flow path
Datasheet

Suppliers

Company
Product
Description
Supplier Links
Acrylic Tube Variable Area Flow Meter, 2001 Series - 2001D2 / 2001D4 / 2001D6 - Brooks Instrument
Hatfield, PA, USA
Acrylic Tube Variable Area Flow Meter, 2001 Series
2001D2 / 2001D4 / 2001D6
Acrylic Tube Variable Area Flow Meter, 2001 Series 2001D2 / 2001D4 / 2001D6
The 2001 Series flow meters provide a means of indication at the lowest cost for non-corrosive flow applications. The tapered metering tube is integrally machined in the acrylic body while a standard direct reading scale engraved on the body affords maximum simplicity of installation and operation. Available options include integral needle control valves, as well as flow controllers on the inlet or outlet. Features Ultra fast 300 millisecond settling time MultiFloTM gas and range programmability User Accessible Service Port with Advanced Diagnostics with User-Friendly Interface Corrosion resistant Hastelloy® sensor tube and valve seat. Pressure Transient Insensitivity (PTI), High Accuracy (HA), Safe Delivery System (SDS) Options Local display Extremely low wetted surface area Benefits Delivers outstanding performance, reliability, and flexibility. Ability to reconfigure the mass flow controller for new gas calibrations and full scale ranges without the time and costs of removing the device from the gas line. Convenient interface to diagnostics for maximum uptime. Ensures device is operating within user specified limits for high yield and maximum uptime. Provides unmatched long-term sensor stability ensuring maximum yield and throughput. Improves yield. Reduces overall gas panel costs. Key Applications Semiconductor MOCVD Gas flow control applications that require a high purity all-metal flow path

The 2001 Series flow meters provide a means of indication at the lowest cost for non-corrosive flow applications. The tapered metering tube is integrally machined in the acrylic body while a standard direct reading scale engraved on the body affords maximum simplicity of installation and operation. Available options include integral needle control valves, as well as flow controllers on the inlet or outlet.

Features

  • Ultra fast 300 millisecond settling time
  • MultiFloTM gas and range programmability
  • User Accessible Service Port with Advanced Diagnostics with User-Friendly Interface
  • Corrosion resistant Hastelloy® sensor tube and valve seat.
  • Pressure Transient Insensitivity (PTI), High Accuracy (HA), Safe Delivery System (SDS) Options
  • Local display
  • Extremely low wetted surface area

Benefits

  • Delivers outstanding performance, reliability, and flexibility.
  • Ability to reconfigure the mass flow controller for new gas calibrations and full scale ranges without the time and costs of removing the device from the gas line.
  • Convenient interface to diagnostics for maximum uptime.
  • Ensures device is operating within user specified limits for high yield and maximum uptime.
  • Provides unmatched long-term sensor stability ensuring maximum yield and throughput.
  • Improves yield. Reduces overall gas panel costs.

Key Applications

  • Semiconductor
  • MOCVD
  • Gas flow control applications that require a high purity all-metal flow path
Supplier's Site Datasheet

Technical Specifications

  Brooks Instrument
Product Category Liquid Flow Meters
Product Number 2001D2 / 2001D4 / 2001D6
Product Name Acrylic Tube Variable Area Flow Meter, 2001 Series
Meter Technology Rotameter; Variable Area
Process Media Type Liquid; Gas
Operating Pressure 100 psi (70.38 m H2O)
Media Temperature 160 F (71 C)
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