AENOR UNE-EN 62047-21:2014

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Semiconductor devices - Micro-electromechani cal devices - Part 21: Test method for Poisson's ratio of thin film MEMS materials (Endorsed by AENOR in November of 2014.)
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Description
Semiconductor devices - Micro-electromechani cal devices - Part 21: Test method for Poisson's ratio of thin film MEMS materials (Endorsed by AENOR in November of 2014.)
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UNE-EN 62047-21:2014
UNE-EN 62047-21:2014
Semiconductor devices - Micro-electromechani cal devices - Part 21: Test method for Poisson's ratio of thin film MEMS materials (Endorsed by AENOR in November of 2014.)

Semiconductor devices - Micro-electromechanical devices - Part 21: Test method for Poisson's ratio of thin film MEMS materials (Endorsed by AENOR in November of 2014.)

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  AENOR
Product Category Standards and Technical Documents
Product Name UNE-EN 62047-21:2014
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