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Advanced Energy Industries, Inc. Precision Optical IR Pyrometer Sekidenko OR400M

Description
The Sekidenko OR400M offers the precise temperature measurement essential to semiconductor applications that require longer wavelengths. Configurable wavelength based on material type and required temperature range Integrated optical sensor Both analog and digital communications with optional Fieldbus protocols for closed-loop control Advanced Energy’s OR400M Optical Pyrometer extends the flexibility of the Sekidenko product family into the mid-IR wavelength range, from 3.3 to 5.2 µm. The OR400M offers a single-channel temperature measurement capability for thin-film solar, glass, and advanced semiconductor processes. The OR400M supports RS-232 and analog data interfaces. Because of its compact design, the OR400M can easily meet small-footprint requirements of many process applications. Benefits Improves temperature measurement accuracy for critical processes Enhances repeatability and minimizes variation Increases productivity, yield, and throughput Increases stability and reliability across multiple chambers and substrate materials Features Non-contact temperature measurement employing lensed optical sensors Automatic ambient thermal correction Industry-leading temperature and read rates Highly flexible, module-based platform architecture Full I/O and external trigger/synchronizat ion suite
Datasheet

Suppliers

Company
Product
Description
Supplier Links
Precision Optical IR Pyrometer - Sekidenko OR400M - Advanced Energy Industries, Inc.
Fort Collins, CO, USA
Precision Optical IR Pyrometer
Sekidenko OR400M
Precision Optical IR Pyrometer Sekidenko OR400M
The Sekidenko OR400M offers the precise temperature measurement essential to semiconductor applications that require longer wavelengths. Configurable wavelength based on material type and required temperature range Integrated optical sensor Both analog and digital communications with optional Fieldbus protocols for closed-loop control Advanced Energy’s OR400M Optical Pyrometer extends the flexibility of the Sekidenko product family into the mid-IR wavelength range, from 3.3 to 5.2 µm. The OR400M offers a single-channel temperature measurement capability for thin-film solar, glass, and advanced semiconductor processes. The OR400M supports RS-232 and analog data interfaces. Because of its compact design, the OR400M can easily meet small-footprint requirements of many process applications. Benefits Improves temperature measurement accuracy for critical processes Enhances repeatability and minimizes variation Increases productivity, yield, and throughput Increases stability and reliability across multiple chambers and substrate materials Features Non-contact temperature measurement employing lensed optical sensors Automatic ambient thermal correction Industry-leading temperature and read rates Highly flexible, module-based platform architecture Full I/O and external trigger/synchronizat ion suite

The Sekidenko OR400M offers the precise temperature measurement essential to semiconductor applications that require longer wavelengths.

  • Configurable wavelength based on material type and required temperature range
  • Integrated optical sensor
  • Both analog and digital communications with optional Fieldbus protocols for closed-loop control

Advanced Energy’s OR400M Optical Pyrometer extends the flexibility of the Sekidenko product family into the mid-IR wavelength range, from 3.3 to 5.2 µm. The OR400M offers a single-channel temperature measurement capability for thin-film solar, glass, and advanced semiconductor processes. The OR400M supports RS-232 and analog data interfaces. Because of its compact design, the OR400M can easily meet small-footprint requirements of many process applications.

Benefits

  • Improves temperature measurement accuracy for critical processes
  • Enhances repeatability and minimizes variation
  • Increases productivity, yield, and throughput
  • Increases stability and reliability across multiple chambers and substrate materials

Features

  • Non-contact temperature measurement employing lensed optical sensors
  • Automatic ambient thermal correction
  • Industry-leading temperature and read rates
  • Highly flexible, module-based platform architecture
  • Full I/O and external trigger/synchronization suite
Supplier's Site Datasheet

Technical Specifications

  Advanced Energy Industries, Inc.
Product Category Noncontact Infrared Temperature Sensors
Product Number Sekidenko OR400M
Product Name Precision Optical IR Pyrometer
Category Sensor/Transducer
Technology Optical Pyrometer
Electrical Output Current; Voltage
Temperature Range 122 to 2372 F (50 to 1300 C)
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