Paramount Plus offers progressive technology and customizable features that include premier pulsing control.
Precise RF and pulse control
Fast response to plasma changes
Built-in diagnostic tools
Get the broadest feature set available in a pulsed-RF product. The Paramount Plus offers precise RF regulation, sophisticated pulse manipulation, and advanced data acquisition. Designed to cover an extensive range of RF energy — frequencies of 400 kHz to 60 MHz and power levels of 1.5 to 15 kW — the Paramount Plus delivers the repeatability and reliability you require.
Benefits
Precisely control RF
Enhance plasma stability
Expedite plasma transitions
Reduce process times
Improve process repeatability and chamber matching
Features
Enhanced RF stability with tightly regulated power output
Advanced multi-level pulsing
Pulse synchronization and monitoring
Real-time power and impedance measurement
Advanced FastDAQ data acquisition system
Paramount Plus offers progressive technology and customizable features that include premier pulsing control.
- Precise RF and pulse control
- Fast response to plasma changes
- Built-in diagnostic tools
Get the broadest feature set available in a pulsed-RF product. The Paramount Plus offers precise RF regulation, sophisticated pulse manipulation, and advanced data acquisition. Designed to cover an extensive range of RF energy — frequencies of 400 kHz to 60 MHz and power levels of 1.5 to 15 kW — the Paramount Plus delivers the repeatability and reliability you require.
Benefits
- Precisely control RF
- Enhance plasma stability
- Expedite plasma transitions
- Reduce process times
- Improve process repeatability and chamber matching
Features
- Enhanced RF stability with tightly regulated power output
- Advanced multi-level pulsing
- Pulse synchronization and monitoring
- Real-time power and impedance measurement
- Advanced FastDAQ data acquisition system
