Palomar Technologies, Inc Wafer Aligner

Overview The SST 1500 is a manually operated wafer aligner capable of aligning wafer sizes to 8-inch (200 mm) diameter. This clean-room compatible aligner includes two CCD cameras mounted on microscope zoom lenses and connected to a split-screen 17-inch LCD monitor. Fiber optic light rings and illuminators are provided for wafer fiducial illumination. The camera lenses are mounted on fully adjustable (X-Y-Z-theta) stages for positioning over wafer fiducials. Features Wafer Level Packaging (WLP) provides for both interconnection and package sealing of circuits at the wafer level. Processes include flip chip solder reflow, solder lid sealing, wafer to wafer bonding using solder, glass, adhesives and direct fusion. Wafer Aligner Capabilities Alignment of wafers of to 8 inch (200mm diameter) Fully adjustable stages for positions over wafer fiducials (X-Y-Z-theta) Wafer fiducial illumination Common Applications Accelerometers Automotive sensors Flip chip Gated light arrays MEMS devices Miniature crystals Night vision IR sensors Uncooled microbolometers