The LPCVD-TEOS trap is designed specifically to meet the demanding requirements of this process. Our dual stage trap contains a stainless steel gauze filter and a 10 micron particulate filter allowing solids to form inside the trap and preventing the small particles from moving down line. It will also capture and hold a small amount of liquid.
Nor-Cal Products, Inc. - The Vacuum Experts | |
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Product Category | Vacuum Flanges and Fittings |
Product Name | LPCVD TEOS Trap, Two Stage |
Port Type | Flange |
Vacuum / Pressure Range | (HV, < 10-3, >10-8 torr) |
Temperature Range | -4 to 302 F (-20 to 150 C) |