Nor-Cal Products, Inc. - The Vacuum Experts LPCVD TEOS Trap, Two Stage

Description
The LPCVD-TEOS trap is designed specifically to meet the demanding requirements of this process. Our dual stage trap contains a stainless steel gauze filter and a 10 micron particulate filter allowing solids to form inside the trap and preventing the small particles from moving down line. It will also capture and hold a small amount of liquid.
Datasheet

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Description
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LPCVD TEOS Trap, Two Stage -  - Nor-Cal Products, Inc. - The Vacuum Experts
Yreka, CA, USA
LPCVD TEOS Trap, Two Stage
LPCVD TEOS Trap, Two Stage
The LPCVD-TEOS trap is designed specifically to meet the demanding requirements of this process. Our dual stage trap contains a stainless steel gauze filter and a 10 micron particulate filter allowing solids to form inside the trap and preventing the small particles from moving down line. It will also capture and hold a small amount of liquid.

The LPCVD-TEOS trap is designed specifically to meet the demanding requirements of this process. Our dual stage trap contains a stainless steel gauze filter and a 10 micron particulate filter allowing solids to form inside the trap and preventing the small particles from moving down line. It will also capture and hold a small amount of liquid.

Supplier's Site Datasheet

Technical Specifications

  Nor-Cal Products, Inc. - The Vacuum Experts
Product Category Vacuum Flanges and Fittings
Product Name LPCVD TEOS Trap, Two Stage
Port Type Flange
Vacuum / Pressure Range (HV, < 10-3, >10-8 torr)
Temperature Range -4 to 302 F (-20 to 150 C)
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