The LPCVD-TEOS trap is designed specifically to meet the demanding requirements of this process. Our three stage trap contains a stainless steel gauze filter, a 10 micron particulate filter and a generous liquid reservoir. This allowing solids to form, prevents small particles from moving down line, and holds large amounts of liquid.
Nor-Cal Products, Inc. - The Vacuum Experts | |
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Product Category | Vacuum Flanges and Fittings |
Product Name | LPCVD TEOS Trap, Three Stage |
Port Type | Flange |
Vacuum / Pressure Range | (HV, < 10-3, >10-8 torr) |
Temperature Range | -4 to 302 F (-20 to 150 C) |