Nor-Cal Products, Inc. - The Vacuum Experts LPCVD TEOS Trap, Three Stage

Description
The LPCVD-TEOS trap is designed specifically to meet the demanding requirements of this process. Our three stage trap contains a stainless steel gauze filter, a 10 micron particulate filter and a generous liquid reservoir. This allowing solids to form, prevents small particles from moving down line, and holds large amounts of liquid.
Datasheet

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LPCVD TEOS Trap, Three Stage -  - Nor-Cal Products, Inc. - The Vacuum Experts
Yreka, CA, USA
LPCVD TEOS Trap, Three Stage
LPCVD TEOS Trap, Three Stage
The LPCVD-TEOS trap is designed specifically to meet the demanding requirements of this process. Our three stage trap contains a stainless steel gauze filter, a 10 micron particulate filter and a generous liquid reservoir. This allowing solids to form, prevents small particles from moving down line, and holds large amounts of liquid.

The LPCVD-TEOS trap is designed specifically to meet the demanding requirements of this process. Our three stage trap contains a stainless steel gauze filter, a 10 micron particulate filter and a generous liquid reservoir. This allowing solids to form, prevents small particles from moving down line, and holds large amounts of liquid.

Supplier's Site Datasheet

Technical Specifications

  Nor-Cal Products, Inc. - The Vacuum Experts
Product Category Vacuum Flanges and Fittings
Product Name LPCVD TEOS Trap, Three Stage
Port Type Flange
Vacuum / Pressure Range (HV, < 10-3, >10-8 torr)
Temperature Range -4 to 302 F (-20 to 150 C)
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