Our LPCVD-TEOS trap is designed specifically to meet the demanding requirements of this process. Our single stage trap contains a huge stainless steel gauze filter allowing solids to form inside the trap instead of the line.
| Nor-Cal Products, Inc. - The Vacuum Experts | |
|---|---|
| Product Category | Vacuum Flanges and Fittings |
| Product Name | LPCVD TEOS Trap, One Stage |
| Port Type | Flange |
| Vacuum / Pressure Range | (HV, < 10-3, >10-8 torr) |
| Temperature Range | -4 to 302 F (-20 to 150 C) |
