The DynamYX® 300 wafer positioning air bearing stage features a simple, 3-piece architecture in a two motor design that provides a cost effective solution for high accuracy and dynamic performance for step-and-settle and/or scanning applications. It has the smallest footprint in Newport’s line of air bearing wafer positioning stages and is designed for 300 mm wafer test, measurement, and processing applications.
| Newport MKS | |
|---|---|
| Product Category | Linear Slides and Linear Stages |
| Product Number | DYNAMYX300 |
| Product Name | Air Bearing Stage, Wafer Positioning, DynamYX ® 300 |
| Stroke or X-Axis Travel | 3.78 inch (96 mm) |
