The 100006113 Viton Seal Set is designed for use with Series 150 or160 vacuum valves with a NW160 (4 inch) port.
100006113 is compatible with these MKS valves:
154-0160A 154-0160C 154-0160P 154-0160T 154-1160A 154-1160C 154-1160T 155-0160A-24V/50-60 155-0160A-24VDC 155-0160C-120V/50-60 155-0160C-24V/50-60 155-0160C-24VDC 155-0160P-120V/50-60 155-0160P-24V/50-60 155-0160P-24VDC 155-0160T-120V/50-60 155-0160T-24V/50-60 155-0160T-24VDC 155-1160A-24V/50-60 155-1160A-24VDC 155-1160C-120V/50-60 155-1160C-24V/50-60 155-1160C-24VDC 155-1160P-120V/50-60 155-1160P-220V/50-60 155-1160P-24V/50-60 155-1160P-24VDC 155-1160T-120V/50-60 155-1160T-24V/50-60 155-1160T-24VDC
The 100006113 Viton Seal Set is designed for use with Series 150 or160 vacuum valves with a NW160 (4 inch) port.
100006113 is compatible with these MKS valves:
154-0160A 154-0160C 154-0160P 154-0160T
154-1160A 154-1160C 154-1160T 155-0160A-24V/50-60
155-0160A-24VDC 155-0160C-120V/50-60 155-0160C-24V/50-60 155-0160C-24VDC
155-0160P-120V/50-60 155-0160P-24V/50-60 155-0160P-24VDC 155-0160T-120V/50-60
155-0160T-24V/50-60 155-0160T-24VDC 155-1160A-24V/50-60 155-1160A-24VDC
155-1160C-120V/50-60 155-1160C-24V/50-60 155-1160C-24VDC 155-1160P-120V/50-60
155-1160P-220V/50-60 155-1160P-24V/50-60 155-1160P-24VDC 155-1160T-120V/50-60
155-1160T-24V/50-60 155-1160T-24VDC