Gelest, Inc. 1,3,5-TRISILAPENTANE SIT8709.8

Additional Properties Hydrolytic Sensitivity 7: reacts slowly with moisture/water Application Employed in PECVD of silicon carbide and silicon carbonitride “seed” layers.1 Reference 1. Weidman, T. et al. US Patent Appl. 2012/0122302 A1, 2012. Safety Packaging Under Nitrogen Volatile Carbosilane Carbosilanes are compounds in which the elements of silicon and carbon alternate in a molecular framework or polymeric backbone in an approximate ratio of 1:1. By appropriate selection of the carbosilane precursor and deposition conditions the silicon carbide framework can be shifted toward substituted silicon and diamond-like structures. 1,3,5-Trisilapentane ; Bis(silylmethyl)sila ne; Trisilmethylene Employed in ALD of SiC films Employed in PECVD of silicon carbide and silicon carbonitride “seed” layers