The NWL200 series is the first lineup of wafer loaders for inspection microscopes capable of loading 100 micron thin wafers. Thanks to a new chuck system, the NWL200 series achieves highly reliable loading suitable for inspection of next-generation semiconductors. Improved wafer-sensing functions also help prevent damage to wafers.
Applications
Wafers
Benefits & features
Remote Access Tool
The loader is equipped with a Web server function. When the loader is connected to a LAN, you can create inspection recipes on a PC and easily backup data from the loader.
Recipe preparation support functions A Web browser wizard guides you through the steps which are reflected in the NWL200. This allows you to prepare optimum recipes safely and simply, while checking the status of the wafers.
Equipment maintenance Easily back up and restore inspection recipes.
Anti-Contamination Measures
To prevent dust arising from friction or impact when centering the wafers, centering and alignment of the orientation flats and notches is performed without contact using photoelectric sensors. The system is configured so as not to interrupt the downflow of clean air in the clean room, and measures are taken to prevent particles arising on the suction surface of the wafer. In addition, the cover is stainless steel to prevent the build-up of static electricity and dust. Every measure has been taken to ensure that today’s highly integrated semiconductor production process is secure from contamination during inspection.
High-Reliability
Should an error occur, an error message is displayed on the LCD panel. Even when the power is turned off, the vacuum chuck of the macro inspection mechanism stays on. If a problem occurs, wafers on the loader can be returned to the carrier without the use of tweezers.
Macro Inspection Functions
In addition to pattern side macro inspections of all areas, macro inspection of the back side periphery and back side center are supported as standard. Macro inspection parameters such as wafer rotation speed and tilt angle can be set automatically or manually. Use the macro setting knobs to preset initial settings and make further adjustments using the joystick. In addition, the new WIL-LED illumination system enables more uniform illumination over a wider area. Various illumination systems are available, from spot lighting to uniform wide area lighting.
The NWL200 series is the first lineup of wafer loaders for inspection microscopes capable of loading 100 micron thin wafers. Thanks to a new chuck system, the NWL200 series achieves highly reliable loading suitable for inspection of next-generation semiconductors. Improved wafer-sensing functions also help prevent damage to wafers.
Applications
Benefits & features
Remote Access Tool
The loader is equipped with a Web server function. When the loader is connected to a LAN, you can create inspection recipes on a PC and easily backup data from the loader.
- Recipe preparation support functions
A Web browser wizard guides you through the steps which are reflected in the NWL200. This allows you to prepare optimum recipes safely and simply, while checking the status of the wafers.
- Equipment maintenance
Easily back up and restore inspection recipes.
Anti-Contamination Measures
To prevent dust arising from friction or impact when centering the wafers, centering and alignment of the orientation flats and notches is performed without contact using photoelectric sensors. The system is configured so as not to interrupt the downflow of clean air in the clean room, and measures are taken to prevent particles arising on the suction surface of the wafer. In addition, the cover is stainless steel to prevent the build-up of static electricity and dust. Every measure has been taken to ensure that today’s highly integrated semiconductor production process is secure from contamination during inspection.
High-Reliability
Should an error occur, an error message is displayed on the LCD panel. Even when the power is turned off, the vacuum chuck of the macro inspection mechanism stays on. If a problem occurs, wafers on the loader can be returned to the carrier without the use of tweezers.
Macro Inspection Functions
In addition to pattern side macro inspections of all areas, macro inspection of the back side periphery and back side center are supported as standard. Macro inspection parameters such as wafer rotation speed and tilt angle can be set automatically or manually. Use the macro setting knobs to preset initial settings and make further adjustments using the joystick. In addition, the new WIL-LED illumination system enables more uniform illumination over a wider area. Various illumination systems are available, from spot lighting to uniform wide area lighting.
