11Boron Trifluoride Electronic Grade. 11BF3 has applications in silicon semiconductor manufacturing as a P-type dopant. It is used where shallow, high concentration boron doping is needed. It can be applied via ion implantation or chemical vapor deposition(CVD). 11BF3 is a colorless, toxic, non-flammable, corrosive high pressure gas
| Linde North America, Inc. | |
|---|---|
| Product Category | Industrial Gases |
| Product Name | 11BF3 Boron Trifluoride |
| Industrial Gases | Boron Trichloride |
