| EBARA Technologies, Inc. | |
|---|---|
| Product Category | Thermal Oxidizers and Catalytic Oxidizers |
| Product Name | PureAir S.DOC |
| Applications | Silane, TEOS, Tungsten, Dichlorosilane, Ammonia, Phosphine |
| Oxidizer Type | Silane Dynamic Oxidation |
| Oxidation Technology | Regenerative Thermal |