Experience unprecedented process stability with the QuiET active isolation system, neutralizing floor vibrations and cancelling out motion system reaction forces, ensuring flawless operation of your machine.
In semiconductor applications, vibration can drastically affect machine accuracy and throughput performance. ETEL’s QuiET Series revolutionizes this, augmenting our Forward Integration Strategy by seamlessly integrating advanced motion systems and state-of-the-art controllers with our proprietary active isolation module. This comprehensive solution minimizes move and settle times, harnessing a unique digital control architecture to offset reaction forces and maintain process accuracy.
With its modular design coupled to standard AccurET controllers, the QuiET Series offers unparalleled adaptability and reliability, promising optimal performance tailored to your requirements.
Characteristics
Forward Integration Strategy enhancing ETEL’s motion platform capabilities
Proprietary active isolation module for vibration cancellation over 6 Degrees of Freedom (6 DOF)
High acceleration feed-forward accuracy
Digital motion control architecture based on 1 Gb TransnET
Modular and scalable design with customizable components
Integrated AccurET controllers for seamless integration and easy serviceability
Experience unprecedented process stability with the QuiET active isolation system, neutralizing floor vibrations and cancelling out motion system reaction forces, ensuring flawless operation of your machine.
In semiconductor applications, vibration can drastically affect machine accuracy and throughput performance. ETEL’s QuiET Series revolutionizes this, augmenting our Forward Integration Strategy by seamlessly integrating advanced motion systems and state-of-the-art controllers with our proprietary active isolation module. This comprehensive solution minimizes move and settle times, harnessing a unique digital control architecture to offset reaction forces and maintain process accuracy.
With its modular design coupled to standard AccurET controllers, the QuiET Series offers unparalleled adaptability and reliability, promising optimal performance tailored to your requirements.
Characteristics
- Forward Integration Strategy enhancing ETEL’s motion platform capabilities
- Proprietary active isolation module for vibration cancellation over 6 Degrees of Freedom (6 DOF)
- High acceleration feed-forward accuracy
- Digital motion control architecture based on 1 Gb TransnET
- Modular and scalable design with customizable components
- Integrated AccurET controllers for seamless integration and easy serviceability
