The QUIET POD is a POD based isolation system calls for a minimum of 4 independent isolation modules which can be used on small and very large machine footprintsThe POD configuration is available in 2 form factors: Small and Large. 5 static load ranges are available ranging from 600 kg to 4.5 tons in standardIt provides a wide range of In-Plane and Out-Of-Plane forces thanks to multiple motor configurations, as well as different cooling and controller configuration options.
Experience unprecedented process stability with the QuiET active isolation system, neutralizing floor vibrations and cancelling out motion system reaction forces, ensuring flawless operation of your machine.
In semiconductor applications, vibration can drastically affect machine accuracy and throughput performance. ETEL’s QuiET Series revolutionizes this, augmenting our Forward Integration Strategy by seamlessly integrating advanced motion systems and state-of-the-art controllers with our proprietary active isolation module. This comprehensive solution minimizes move and settle times, harnessing a unique digital control architecture to offset reaction forces and maintain process accuracy.
With its modular design coupled to standard AccurET controllers, the QuiET Series offers unparalleled adaptability and reliability, promising optimal performance tailored to your requirements.
ETEL S.A. | |
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Product Category | Vibration Isolators and Machine Mounts |
Product Number | QuiET |
Product Name | QUIET POD Active Isolation System |
Application | Vibration Isolation |